Low Cost CNC Back Side Sample Preparation for FIB Analysis

  • Connor Wong McMaster University

Abstract

The following article is an overview of an attempt to develop appropriate methods and supporting apparatus for the use of a standard relatively low cost CNC mill for back side sample preparation for FIB analysis. The effort was successful, resulting in an adjustable stage, a reliable zeroing method, and a recipe for silicon milling and polishing that successfully produced seven FIB appropriate samples, two of which were tested in the FIB and all of which were functional after processing.

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Published
2018-01-16